Inventor
FURUI TOSHIKAZU
JP9 patents
Patents
9 patentsUS7790578B2Sep 7, 2010
Dicing method using volatile protective agent
FUJITSU LTD27 citations90
US7838796B2Nov 23, 2010
Stack structure cutting method and stack structure
FUJITSU LTD12 citations82
US7517423B2Apr 14, 2009
Method of cutting laminate, apparatus for manufacturing laminate, method of manufacturing laminate, and laminate
FUJITSU LTD8 citations82
US7491288B2Feb 17, 2009
Method of cutting laminate with laser and laminate
FUJITSU LTD12 citations82
US7572350B2Aug 11, 2009
Method of cutting laminate, apparatus for manufacturing laminate, method of manufacturing laminate, and laminate
FUJITSU LTD4 citations61
US7146863B2Dec 12, 2006
Torsion angle measuring method and device for magnetic-disk suspension
FUJITSU LTD3 citations60
US7570407B2Aug 4, 2009
Scanning mechanism, method of machining workpiece, and machine tool
FUJITSU LTD0 citations50
US7498237B2Mar 3, 2009
Method of manufacturing devices, positioning method, dicing method and dicing apparatus
FUJITSU LTD0 citations50
US7462312B2Dec 9, 2008
Method of fabricating element having microstructure
FUJITSU LTD0 citations50