Inventor
YANG SEUNG-HUNE
KR13 patents
⚠️ This page may combine multiple inventors who share the name “YANG SEUNG-HUNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SAMSUNG ELECTRONICS CO LTD
11 patentsUS7061582B2Jun 13, 2006
Exposure apparatus including micro mirror array and exposure method using the same
SAMSUNG ELECTRONICS CO LTD94 citations96
US6627366B2Sep 30, 2003
Electron beam exposure method having good linearity with respect to producing fine patterns
SAMSUNG ELECTRONICS CO LTD32 citations91
US6783905B2Aug 31, 2004
Electron beam exposure method using variable backward scattering coefficient and computer-readable recording medium having thereof
SAMSUNG ELECTRONICS CO LTD16 citations83
US6775815B2Aug 10, 2004
Exposure method for correcting line width variation in a photomask
SAMSUNG ELECTRONICS CO LTD14 citations82
US6555275B2Apr 29, 2003
Technique of exposing a resist using electron beams having different accelerating voltages, and method of manufacturing a photomask using the technique
SAMSUNG ELECTRONICS CO LTD7 citations72
US9703189B2Jul 11, 2017
Method of calculating a shift vale of a cell contact
SAMSUNG ELECTRONICS CO LTD4 citations69
US9542740B2Jan 10, 2017
Method for detecting defect in pattern
SAMSUNG ELECTRONICS CO LTD3 citations68
US7185312B2Feb 27, 2007
Exposure method for correcting line width variation in a photomask
SAMSUNG ELECTRONICS CO LTD2 citations61
US6641979B2Nov 4, 2003
Technique of exposing a resist using electron beams having different accelerating voltages
SAMSUNG ELECTRONICS CO LTD2 citations61
US11714347B2Aug 1, 2023
Process proximity correction method and the computing device for the same
SAMSUNG ELECTRONICS CO LTD1 citations54
US10126646B2Nov 13, 2018
Method of calculating a shift value of a cell contact
SAMSUNG ELECTRONICS CO LTD0 citations48