Inventor
WALTON HUGH A
US3 patents
Patents
3 patentsUS7198699B2Apr 3, 2007
Sputter coating apparatus including ion beam source(s), and corresponding method
GUARDIAN INDUSTRIES41 citations90
US7405411B2Jul 29, 2008
Ion source with multi-piece outer cathode
GUARDIAN INDUSTRIES22 citations87
US7598500B2Oct 6, 2009
Ion source and metals used in making components thereof and method of making same
GUARDIAN INDUSTRIES4 citations59