Inventor
WIENECKE JOACHIM
DE18 patents
⚠️ This page may combine multiple inventors who share the name “WIENECKE JOACHIM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LEICA MICROSYSTEMS
14 patentsUS7152488B2Dec 26, 2006
System operating unit
LEICA MICROSYSTEMS94 citations95
US6920249B2Jul 19, 2005
Method and measuring instrument for determining the position of an edge of a pattern element on a substrate
LEICA MICROSYSTEMS50 citations91
US6456373B1Sep 24, 2002
Method and apparatus for monitoring the light emitted from an illumination apparatus for an optical measuring instrument
LEICA MICROSYSTEMS54 citations91
US6962471B2Nov 8, 2005
Substrate conveying module and system made up of substrate conveying module and workstation
LEICA MICROSYSTEMS44 citations90
US6918735B2Jul 19, 2005
Holding device for wafers
LEICA MICROSYSTEMS51 citations88
US6504608B2Jan 7, 2003
Optical measurement arrangement and method for inclination measurement
LEICA MICROSYSTEMS23 citations88
US6941009B2Sep 6, 2005
Method for evaluating pattern defects on a water surface
LEICA MICROSYSTEMS13 citations84
US6696679B1Feb 24, 2004
Method for focusing of disk-shaped objects with patterned surfaces during imaging
LEICA MICROSYSTEMS15 citations79
US6826511B2Nov 30, 2004
Method and apparatus for the determination of layer thicknesses
LEICA MICROSYSTEMS12 citations71
US6618154B2Sep 9, 2003
Optical measurement arrangement, in particular for layer thickness measurement
LEICA MICROSYSTEMS7 citations71
US7041952B2May 9, 2006
Method for automatic focusing an imaging optical system on the surface of a sample
LEICA MICROSYSTEMS7 citations68
US6985237B2Jan 10, 2006
Method for determining layer thickness ranges
LEICA MICROSYSTEMS4 citations61
US6713746B2Mar 30, 2004
Arrangement and method for illuminating a specimen field in an optical instrument
LEICA MICROSYSTEMS5 citations61
US7002740B2Feb 21, 2006
Setting module for the illumination of an optical instrument
LEICA MICROSYSTEMS1 citations51