Inventor
MO RENEE TONG
US6 patents
Patents
6 patentsUS7993995B2Aug 9, 2011
Metal-gated MOSFET devices having scaled gate stack thickness including gettering species in a buried oxide
IBM7 citations83
US7648868B2Jan 19, 2010
Metal-gated MOSFET devices having scaled gate stack thickness
IBM15 citations83
US7785952B2Aug 31, 2010
Partially and fully silicided gate stacks
IBM3 citations61
US7960795B2Jun 14, 2011
Partially and fully silicided gate stacks
IBM0 citations51
US7767579B2Aug 3, 2010
Protection of SiGe during etch and clean operations
IBM1 citations51
US7776624B2Aug 17, 2010
Method for improving semiconductor surfaces
IBM0 citations36