Inventor

KITAHATA HIROYA

JP2 patents

⚠️ This page may combine multiple inventors who share the name “KITAHATA HIROYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEKISUI CHEMICAL CO LTD

1 patent

US7819081B2Oct 26, 2010

Plasma film forming system

SEKISUI CHEMICAL CO LTD20 citations79

SEKESUI CHEMICAL CO LTD

1 patent

US7507678B2Mar 24, 2009

Method and apparatus for forming oxynitride film and nitride film, oxynitride film, nitride film, and substrate

SEKESUI CHEMICAL CO LTD0 citations35