Inventor
IWAMA SATORU
JP5 patents
⚠️ This page may combine multiple inventors who share the name “IWAMA SATORU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
4 patentsUS6995370B2Feb 7, 2006
Scanning electron microscope
HITACHI HIGH TECH CORP12 citations82
US7960696B2Jun 14, 2011
Method for inspecting and measuring sample and scanning electron microscope
HITACHI HIGH TECH CORP4 citations61
US7375329B2May 20, 2008
Scanning electron microscope
HITACHI HIGH TECH CORP2 citations61
US7723681B2May 25, 2010
Observation method with electron beam
HITACHI HIGH TECH CORP0 citations49