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Inventor

MILGATE III ROBERT W

US9 patents
⚠️ This page may combine multiple inventors who share the name “MILGATE III ROBERT W”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SEMEQUIP INC

5 patents
US7629590B2Dec 8, 2009

Method and apparatus for extending equipment uptime in ion implantation

SEMEQUIP INC41 citations95
US7820981B2Oct 26, 2010

Method and apparatus for extending equipment uptime in ion implantation

SEMEQUIP INC30 citations92
US7723700B2May 25, 2010

Controlling the flow of vapors sublimated from solids

SEMEQUIP INC20 citations92
US7791047B2Sep 7, 2010

Method and apparatus for extracting ions from an ion source for use in ion implantation

SEMEQUIP INC17 citations90
US8368309B2Feb 5, 2013

Method and apparatus for extracting ions from an ion source for use in ion implantation

SEMEQUIP INC6 citations82

TOKYO ELECTRON LTD

1 patent
US6173673B1Jan 16, 2001

Method and apparatus for insulating a high power RF electrode through which plasma discharge gases are injected into a processing chamber

TOKYO ELECTRON LTD97 citations93

VARIAN ASSOCIATES

1 patent
US4560880ADec 24, 1985

Apparatus for positioning a workpiece in a localized vacuum processing system

VARIAN ASSOCIATES49 citations89

ECLIPSE ION TECHNOLOGY INC

1 patent
US4836233AJun 6, 1989

Method and apparatus for venting vacuum processing equipment

ECLIPSE ION TECHNOLOGY INC20 citations80

FUNAI ELECTRIC CO

1 patent
US11858268B1Jan 2, 2024

Ejection head priming mechanism

FUNAI ELECTRIC CO0 citations57