Inventor
KRULL WADE ALLEN
US3 patents
Patents
3 patentsUS7791047B2Sep 7, 2010
Method and apparatus for extracting ions from an ion source for use in ion implantation
SEMEQUIP INC17 citations90
US8368309B2Feb 5, 2013
Method and apparatus for extracting ions from an ion source for use in ion implantation
SEMEQUIP INC6 citations82
US7994031B2Aug 9, 2011
Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
SEMEQUIP INC1 citations48