Inventor
VISSER HUGO MATTHIEU
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VISSER HUGO MATTHIEU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS6781673B2Aug 24, 2004
Mask handling apparatus, lithographic projection apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV56 citations94
US7088424B2Aug 8, 2006
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
ASML NETHERLANDS BV18 citations92
US6859259B2Feb 22, 2005
Lithographic projection apparatus and reflector assembly for use therein
ASML NETHERLANDS BV29 citations92
US6678037B2Jan 13, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV32 citations92
US7026629B2Apr 11, 2006
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV22 citations88
US6930760B2Aug 16, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV10 citations73
US7852460B2Dec 14, 2010
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
ASML NETHERLANDS BV4 citations62