Inventor
DE REGE THESAURO FRANCESCO
US14 patents
⚠️ This page may combine multiple inventors who share the name “DE REGE THESAURO FRANCESCO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CABOT MICROELECTRONICS CORP
7 patentsUS7316603B2Jan 8, 2008
Compositions and methods for tantalum CMP
CABOT MICROELECTRONICS CORP16 citations84
US7160807B2Jan 9, 2007
CMP of noble metals
CABOT MICROELECTRONICS CORP12 citations82
US7161247B2Jan 9, 2007
Polishing composition for noble metals
CABOT MICROELECTRONICS CORP18 citations82
US7456107B2Nov 25, 2008
Compositions and methods for CMP of low-k-dielectric materials
CABOT MICROELECTRONICS CORP15 citations78
US7288021B2Oct 30, 2007
Chemical-mechanical polishing of metals in an oxidized form
CABOT MICROELECTRONICS CORP7 citations72
US7776230B2Aug 17, 2010
CMP system utilizing halogen adduct
CABOT MICROELECTRONICS CORP3 citations62
US7803203B2Sep 28, 2010
Compositions and methods for CMP of semiconductor materials
CABOT MICROELECTRONICS CORP1 citations51
DE REGE THESAURO FRANCESCO
4 patentsUS8101093B2Jan 24, 2012
Chemical-mechanical polishing composition and method for using the same
DE REGE THESAURO FRANCESCO10 citations82
US8247327B2Aug 21, 2012
Methods and compositions for polishing silicon-containing substrates
DE REGE THESAURO FRANCESCO5 citations72
US8597540B2Dec 3, 2013
Compositions for polishing silicon-containing substrates
DE REGE THESAURO FRANCESCO2 citations61
US8529680B2Sep 10, 2013
Compositions for CMP of semiconductor materials
DE REGE THESAURO FRANCESCO2 citations61