Inventor

TSAI MING-SHIH

TW8 patents

⚠️ This page may combine multiple inventors who share the name “TSAI MING-SHIH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VERSUM MAT US LLC

2 patents

US11401441B2Aug 2, 2022

Chemical mechanical planarization (CMP) composition and methods therefore for copper and through silica via (TSV) applications

VERSUM MAT US LLC4 citations66

US11718767B2Aug 8, 2023

Chemical mechanical planarization composition for polishing oxide materials and method of use thereof

VERSUM MAT US LLC1 citations56

NAT SCIENCE COUNCIL REPUBLIC CHINA

1 patent

US5922091AJul 13, 1999

Chemical mechanical polishing slurry for metallic thin film

NAT SCIENCE COUNCIL REPUBLIC CHINA89 citations95

NAT SCIENCE COUNCIL

1 patent

US6174454B1Jan 16, 2001

Slurry formulation for selective CMP of organic spin-on-glass insulating layer with low dielectric constant

NAT SCIENCE COUNCIL13 citations72

MOEGGENBORG KEVIN

1 patent

US8691695B2Apr 8, 2014

CMP compositions and methods for suppressing polysilicon removal rates

MOEGGENBORG KEVIN5 citations69

DE REGE THESAURO FRANCESCO

1 patent

US8529680B2Sep 10, 2013

Compositions for CMP of semiconductor materials

DE REGE THESAURO FRANCESCO2 citations61

S M SZE

1 patent

US6555424B2Apr 29, 2003

Thin film transistor with sub-gates and schottky source/drain and a manufacturing method of the same

S M SZE4 citations60

CABOT MICROELECTRONICS CORP

1 patent

US7803203B2Sep 28, 2010

Compositions and methods for CMP of semiconductor materials

CABOT MICROELECTRONICS CORP1 citations51