Inventor
WILLEY MARK J
US11 patents
⚠️ This page may combine multiple inventors who share the name “WILLEY MARK J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NOVELLUS SYSTEMS INC
7 patentsUS7776741B2Aug 17, 2010
Process for through silicon via filing
NOVELLUS SYSTEMS INC43 citations94
US9721800B2Aug 1, 2017
Apparatus for wetting pretreatment for enhanced damascene metal filling
NOVELLUS SYSTEMS INC5 citations84
US8372258B2Feb 12, 2013
Monitoring of electroplating additives
NOVELLUS SYSTEMS INC7 citations83
US9852913B2Dec 26, 2017
Wetting pretreatment for enhanced damascene metal filling
NOVELLUS SYSTEMS INC3 citations73
US9593426B2Mar 14, 2017
Through silicon via filling using an electrolyte with a dual state inhibitor
NOVELLUS SYSTEMS INC2 citations72
US10840101B2Nov 17, 2020
Wetting pretreatment for enhanced damascene metal filling
NOVELLUS SYSTEMS INC0 citations52
US9816196B2Nov 14, 2017
Method and apparatus for electroplating semiconductor wafer when controlling cations in electrolyte
NOVELLUS SYSTEMS INC1 citations48