Inventor
HOEFER HOLGER
DE10 patents
⚠️ This page may combine multiple inventors who share the name “HOEFER HOLGER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
BOSCH GMBH ROBERT
6 patentsUS6620735B2Sep 16, 2003
Method for processing substrates
BOSCH GMBH ROBERT7 citations72
US7564033B2Jul 21, 2009
Microstructured sensor
BOSCH GMBH ROBERT2 citations61
US11505455B2Nov 22, 2022
Method for producing a micromechanical device having a damper structure
BOSCH GMBH ROBERT0 citations58
US6974515B2Dec 13, 2005
Ceramic substrate and method of manufacturing same
BOSCH GMBH ROBERT4 citations53
US10584029B2Mar 10, 2020
Method for producing thin MEMS chips on SOI substrate and micromechanical component
BOSCH GMBH ROBERT0 citations51
US10684185B2Jun 16, 2020
Sensor and/or sound detection device and manufacturing method for a sensor and/or sound detection device
BOSCH GMBH ROBERT0 citations38