Inventor
KOMANO HARUKI
JP11 patents
Patents
11 patentsUS5429730AJul 4, 1995
Method of repairing defect of structure
TOSHIBA KK114 citations97
US6028953AFeb 22, 2000
Mask defect repair system and method which controls a dose of a particle beam
TOSHIBA KK65 citations96
US5807650ASep 15, 1998
Photo mask and apparatus for repairing photo mask
TOSHIBA KK57 citations96
US5639699AJun 17, 1997
Focused ion beam deposition using TMCTS
TOSHIBA KK62 citations96
US5591970AJan 7, 1997
Charged beam apparatus
TOSHIBA KK56 citations96
US5083033AJan 21, 1992
Method of depositing an insulating film and a focusing ion beam apparatus
TOSHIBA KK80 citations95
US5837405ANov 17, 1998
Reticle
TOSHIBA KK28 citations92
US5799104AAug 25, 1998
Mask defect repair system and method
TOSHIBA KK38 citations92
US5589305ADec 31, 1996
Method of fabricating a reticle
TOSHIBA KK19 citations92
US5660956AAug 26, 1997
Reticle and method of fabricating reticle
TOSHIBA KK16 citations73
US5595844AJan 21, 1997
Method of exposing light in a method of fabricating a reticle
TOSHIBA KK12 citations73