Inventor

LO CARY CHIA-CHIUNG

TW5 patents

⚠️ This page may combine multiple inventors who share the name “LO CARY CHIA-CHIUNG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAIWAN SEMICONDUCTOR MFG

2 patents

US9048087B2Jun 2, 2015

Methods for wet clean of oxide layers over epitaxial layers

TAIWAN SEMICONDUCTOR MFG8 citations83

US8927362B2Jan 6, 2015

CMOS device and method of forming the same

TAIWAN SEMICONDUCTOR MFG9 citations83

CHING KUO-CHENG

1 patent

US8680576B2Mar 25, 2014

CMOS device and method of forming the same

CHING KUO-CHENG198 citations97

PENG CHIH I

1 patent

US10279311B2May 7, 2019

System and method for operating chemical mechanical polishing process

PENG CHIH I1 citations55

LIN KUO YIN

1 patent

US9937536B2Apr 10, 2018

Air purge cleaning for semiconductor polishing apparatus

LIN KUO YIN0 citations45