P

Inventor

NAKANO MITSUHIRO

JP10 patents
⚠️ This page may combine multiple inventors who share the name “NAKANO MITSUHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

FUJITSU LTD

4 patents
US5892237AApr 6, 1999

Charged particle beam exposure method and apparatus

FUJITSU LTD28 citations92
US5334846AAug 2, 1994

Correction of charged particle beam exposure deflection by detecting stage position and a position detection mark

FUJITSU LTD25 citations92
US5329130AJul 12, 1994

Charged particle beam exposure method and apparatus

FUJITSU LTD33 citations91
US5610406AMar 11, 1997

Charged particle beam exposure method and apparatus

FUJITSU LTD11 citations73

OLYMPUS CORP

3 patents
US7696996B2Apr 13, 2010

Laser scanning microscope apparatus

OLYMPUS CORP4 citations62
US7982948B2Jul 19, 2011

Scanning microscope for 3-D imaging of a moving specimen

OLYMPUS CORP4 citations61
US7983466B2Jul 19, 2011

Microscope apparatus and cell observation method

OLYMPUS CORP0 citations51

NAKANO MITSUHIRO

2 patents
US8792703B2Jul 29, 2014

Method for tracking cells

NAKANO MITSUHIRO1 citations46
US8994806B2Mar 31, 2015

Microscope apparatus chronologically storing different types of image information

NAKANO MITSUHIRO0 citations36

YAMADA AKIO

1 patent
US8222619B2Jul 17, 2012

Multi-column electron beam exposure apparatus and multi-column electron beam exposure method

YAMADA AKIO0 citations50