P

Inventor

BURGGRAF JÜRGEN

AT11 patents
⚠️ This page may combine multiple inventors who share the name “BURGGRAF JÜRGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BURGGRAF JÜRGEN

5 patents
US9296193B2Mar 29, 2016

Bendable carrier mount, device and method for releasing a carrier substrate

BURGGRAF JÜRGEN22 citations88
US8918989B2Dec 30, 2014

Device for aligning and pre-fixing a wafer

BURGGRAF JÜRGEN6 citations79
US9272501B2Mar 1, 2016

Device for detaching a product substrate off a carrier substrate

BURGGRAF JÜRGEN3 citations71
US9362154B2Jun 7, 2016

Method for treatment of a temporarily bonded product wafer

BURGGRAF JÜRGEN0 citations48
US9224630B2Dec 29, 2015

Method for producing a wafer provided with chips

BURGGRAF JÜRGEN0 citations38

EV GROUP E THALLNER GMBH

2 patents
US12482678B2Nov 25, 2025

Apparatus with deformable heater and method for heating a substrate thereof

EV GROUP E THALLNER GMBH0 citations60
US12087726B2Sep 10, 2024

Device and method for joining substrates

EV GROUP E THALLNER GMBH1 citations60

LINDNER FRIEDRICH PAUL

1 patent
US8894807B2Nov 25, 2014

Device and method for detaching a semiconductor wafer from a substrate

LINDNER FRIEDRICH PAUL3 citations60

TIEFENBÖCK HERBERT

1 patent
US9278433B2Mar 8, 2016

Receiving device for receiving semiconductor substrates

TIEFENBÖCK HERBERT2 citations55

REBHAN BERNHARD

1 patent
US9500541B2Nov 22, 2016

Method and device for determining the pressure distribution for bonding

REBHAN BERNHARD0 citations45

BURGGRAF JUERGEN

1 patent
US10497601B2Dec 3, 2019

Device and method for coating of a carrier wafer

BURGGRAF JUERGEN0 citations32