Inventor
HOSLER ERIK R
US6 patents
Patents
6 patentsUS9754829B2Sep 5, 2017
Self-aligned conductive polymer pattern placement error compensation layer
GLOBALFOUNDRIES INC3 citations68
US9748176B2Aug 29, 2017
Pattern placement error compensation layer in via opening
GLOBALFOUNDRIES INC0 citations47
US9704807B2Jul 11, 2017
Pattern placement error compensation layer
GLOBALFOUNDRIES INC0 citations47
US9633942B1Apr 25, 2017
Conductively doped polymer pattern placement error compensation layer
GLOBALFOUNDRIES INC1 citations47
US10748671B2Aug 18, 2020
Radial lithographic source homogenizer
GLOBALFOUNDRIES INC0 citations41
US10444645B1Oct 15, 2019
Balancing collector contamination of a light source by selective deposition
GLOBALFOUNDRIES INC0 citations41