Inventor
KAGAJWALA BURHANUDDIN
US5 patents
⚠️ This page may combine multiple inventors who share the name “KAGAJWALA BURHANUDDIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS9567685B2Feb 14, 2017
Apparatus and method for dynamic control of plated uniformity with the use of remote electric current
LAM RES CORP11 citations83
US9752248B2Sep 5, 2017
Methods and apparatuses for dynamically tunable wafer-edge electroplating
LAM RES CORP18 citations82
US10014170B2Jul 3, 2018
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
LAM RES CORP3 citations72
US10923340B2Feb 16, 2021
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
LAM RES CORP0 citations62