Inventor
CHANG MIN-GU
KR4 patents
Patents
4 patentsUS8967403B2Mar 3, 2015
Hoist apparatus and hoist transporting system
SAMSUNG ELECTRONICS CO LTD5 citations70
US8939696B2Jan 27, 2015
Automatic carrier transfer for transferring a substrate carrier in a semiconductor manufacturing post-process and method of transferring the substrate carrier using the same
SAMSUNG ELECTRONICS CO LTD4 citations70
US10170351B2Jan 1, 2019
Transferring apparatus and method for manufacturing an integrated circuit device
SAMSUNG ELECTRONICS CO LTD3 citations63
US12370580B2Jul 29, 2025
Cleaning device and method of substrate transfer device
SAMSUNG ELECTRONICS CO LTD0 citations54