P

Inventor

PNINI-MITTLER BOAZ

DE7 patents
⚠️ This page may combine multiple inventors who share the name “PNINI-MITTLER BOAZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ZEISS CARL SMT GMBH

5 patents
US10215953B2Feb 26, 2019

Tilting an optical element

ZEISS CARL SMT GMBH2 citations68
US12164234B2Dec 10, 2024

Actuator device and method for aligning an optical element, optical assembly and projection exposure apparatus

ZEISS CARL SMT GMBH0 citations57
US10495845B2Dec 3, 2019

Tilting an optical element

ZEISS CARL SMT GMBH0 citations47
US9274256B2Mar 1, 2016

Systems for aligning an optical element and method for same

ZEISS CARL SMT GMBH0 citations47
US9423590B2Aug 23, 2016

Liquid cooled EUV reflector

ZEISS CARL SMT GMBH0 citations40

SCHMIDTS NICOLAS

1 patent
US9482959B2Nov 1, 2016

EUV microlithography illumination optical system and EUV attenuator for same

SCHMIDTS NICOLAS2 citations50

PNINI-MITTLER BOAZ

1 patent
US8665419B2Mar 4, 2014

Device for an optical arrangement and method for positioning an optical element of an optical arrangement

PNINI-MITTLER BOAZ0 citations29