Inventor
MATSUDO MASAHIKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “MATSUDO MASAHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
12 patentsUS5532613AJul 2, 1996
Probe needle
TOKYO ELECTRON LTD58 citations95
US6057694AMay 2, 2000
Testing method including the removal of insulative films for electrical contact and apparatus therefor
TOKYO ELECTRON LTD23 citations92
US5252892AOct 12, 1993
Plasma processing apparatus
TOKYO ELECTRON LTD30 citations92
US5101110AMar 31, 1992
Ion generator
TOKYO ELECTRON LTD33 citations92
US5028791AJul 2, 1991
Electron beam excitation ion source
TOKYO ELECTRON LTD44 citations92
US5089710AFeb 18, 1992
Ion implantation equipment
TOKYO ELECTRON LTD32 citations88
US5049784ASep 17, 1991
Electron generating apparatus
TOKYO ELECTRON LTD16 citations73
US5690998ANov 25, 1997
Method of coating a conductive probe needle
TOKYO ELECTRON LTD7 citations72
US5698035ADec 16, 1997
Heat-resistant electrode material, electrode using the same, and apparatus having plasma generating unit using this electrode
TOKYO ELECTRON LTD12 citations71
US7615251B2Nov 10, 2009
Processing device using shower head structure and processing method
TOKYO ELECTRON LTD3 citations62
US6448178B1Sep 10, 2002
Heat treating method for thin film and forming method for thin film
TOKYO ELECTRON LTD2 citations62
US6821874B2Nov 23, 2004
Method for depositing tungsten silicide film and method for preparing gate electrode/wiring
TOKYO ELECTRON LTD0 citations52