Inventor
TANIGUCHI KAZUTAKE
JP5 patents
Patents
5 patentsUS11624979B2Apr 11, 2023
Mask blank, transfer mask, and method of manufacturing semiconductor device
HOYA CORP0 citations59
US11314162B2Apr 26, 2022
Mask blank, transfer mask, and method of manufacturing semiconductor device
HOYA CORP0 citations59
US11022875B2Jun 1, 2021
Mask blank, phase shift mask, and method of manufacturing semiconductor device
HOYA CORP1 citations59
US12326656B2Jun 10, 2025
Mask blank and method of manufacturing photomask
HOYA CORP0 citations55
US11314161B2Apr 26, 2022
Mask blank, phase shift mask, and method of manufacturing semiconductor device
HOYA CORP0 citations48