Inventor
WEBB DOUGLAS A
US23 patents
⚠️ This page may combine multiple inventors who share the name “WEBB DOUGLAS A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEXAS INSTRUMENTS INC
9 patentsUS5610438AMar 11, 1997
Micro-mechanical device with non-evaporable getter
TEXAS INSTRUMENTS INC539 citations99
US5523878AJun 4, 1996
Self-assembled monolayer coating for micro-mechanical devices
TEXAS INSTRUMENTS INC195 citations99
US5512374AApr 30, 1996
PFPE coatings for micro-mechanical devices
TEXAS INSTRUMENTS INC163 citations99
US5002632AMar 26, 1991
Method and apparatus for etching semiconductor materials
TEXAS INSTRUMENTS INC473 citations99
US5504614AApr 2, 1996
Method for fabricating a DMD spatial light modulator with a hardened hinge
TEXAS INSTRUMENTS INC181 citations98
US5447600ASep 5, 1995
Polymeric coatings for micromechanical devices
TEXAS INSTRUMENTS INC132 citations98
US5739941AApr 14, 1998
Non-linear hinge for micro-mechanical device
TEXAS INSTRUMENTS INC86 citations96
US4894352AJan 16, 1990
Deposition of silicon-containing films using organosilicon compounds and nitrogen trifluoride
TEXAS INSTRUMENTS INC330 citations94
US5768007AJun 16, 1998
Phase matched reset for digital micro-mirror device
TEXAS INSTRUMENTS INC49 citations89
SILICON LIGHT MACHINES CORP
7 patentsUS7247832B2Jul 24, 2007
Signal processing circuit and method using analog voltage signal to pulse width modulation conversion
SILICON LIGHT MACHINES CORP92 citations98
US7250893B2Jul 31, 2007
Signal processing circuit and method for use with an optical navigation system
SILICON LIGHT MACHINES CORP20 citations92
US7161518B1Jan 9, 2007
Method and apparatus for driving two-dimensional modulator arrays
SILICON LIGHT MACHINES CORP13 citations83
US6967758B2Nov 22, 2005
System and method for sub-pixel electronic alignment
SILICON LIGHT MACHINES CORP3 citations63
US7405389B2Jul 29, 2008
Dense multi-axis array for motion sensing
SILICON LIGHT MACHINES CORP6 citations61
US7218336B2May 15, 2007
Methods and apparatus for driving illuminators in printing applications
SILICON LIGHT MACHINES CORP2 citations60
US7053930B2May 30, 2006
Triangular bidirectional scan method for projection display
SILICON LIGHT MACHINES CORP6 citations59
TOKYO ELECTRON LTD
3 patentsUS6093645AJul 25, 2000
Elimination of titanium nitride film deposition in tungsten plug technology using PE-CVD-TI and in-situ plasma nitridation
TOKYO ELECTRON LTD54 citations96
US5906866AMay 25, 1999
Process for chemical vapor deposition of tungsten onto a titanium nitride substrate surface
TOKYO ELECTRON LTD62 citations96
US6271121B1Aug 7, 2001
Process for chemical vapor deposition of tungsten onto a titanium nitride substrate surface
TOKYO ELECTRON LTD22 citations92