Inventor

TAKAI KOSUKE

JP22 patents

⚠️ This page may combine multiple inventors who share the name “TAKAI KOSUKE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TAKAI KOSUKE

KIOXIA CORP

Pattern forming method, combined processing apparatus, and recording medium

Substrate processing method and substrate processing apparatus

Processing apparatus for processing substrates of different types

Substrate processing method and substrate processing apparatus

Method for producing photomask, method for producing semiconductor device, method for forming pattern, and photomask

Semiconductor device, template, and method of manufacturing template

Exposure mask and manufacturing method of same

Template, manufacturing method of template

Pattern inspection method and photomask fabrication method

Substrate processing method and substrate processing device

TOSHIBA MEMORY CORP

EUV mask and method for manufacturing same

Lithography mask production method and lithography mask production system

Substrate processing method, substrate processing apparatus, and composite processing apparatus

Substrate processing method, substrate processing apparatus, and composite processing apparatus

Reflection-type exposure mask

Light reflection type lithography mask, its manufacturing method, mask data generation method and mask blank

Photomask manufacturing method and photomask

TOSHIBA KK

Light-reflective photomask and mask blank for EUV exposure, and manufacturing method of semiconductor device

Reflection-type mask and method of making the reflection-type mask

Light reflecting mask, exposure apparatus, and measuring method

SHIBAURA MECHATRONICS CORP

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask

YOSHIMORI TOMOAKI

Method for manufacturing reflective mask and apparatus for manufacturing reflective mask