Inventor
TANABE MANA
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TANABE MANA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KIOXIA CORP
4 patentsUS11776823B2Oct 3, 2023
Substrate processing method and substrate processing apparatus
KIOXIA CORP0 citations60
US11682566B2Jun 20, 2023
Processing apparatus for processing substrates of different types
KIOXIA CORP0 citations60
US11443963B2Sep 13, 2022
Substrate processing method and substrate processing apparatus
KIOXIA CORP0 citations60
US12532696B2Jan 20, 2026
Substrate processing method and substrate processing device
KIOXIA CORP0 citations49
TOSHIBA MEMORY CORP
3 patentsUS11061324B2Jul 13, 2021
Manufacturing method of replica template, manufacturing method of semiconductor device, and master template
TOSHIBA MEMORY CORP2 citations70
US11123774B2Sep 21, 2021
Substrate processing method, substrate processing apparatus, and composite processing apparatus
TOSHIBA MEMORY CORP0 citations50
US11185895B2Nov 30, 2021
Substrate processing method, substrate processing apparatus, and composite processing apparatus
TOSHIBA MEMORY CORP0 citations49