Inventor
KITAZUME DAICHI
JP3 patents
Patents
3 patentsUS11453098B2Sep 27, 2022
Carrier for double-side polishing apparatus, double-side polishing apparatus, and double-side polishing method
SHINETSU HANDOTAI KK0 citations57
US11065735B2Jul 20, 2021
Manufacturing method of carrier for double-side polishing apparatus and method of double-side polishing wafer
SHINETSU HANDOTAI KK1 citations57
US11298796B2Apr 12, 2022
Method for double-side polishing wafer
SHINETSU HANDOTAI KK0 citations47