Inventor
GREADY DAVID
IL5 patents
⚠️ This page may combine multiple inventors who share the name “GREADY DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
4 patentsUS11112369B2Sep 7, 2021
Hybrid overlay target design for imaging-based overlay and scatterometry-based overlay
KLA TENCOR CORP8 citations78
US10726169B2Jul 28, 2020
Target and process sensitivity analysis to requirements
KLA TENCOR CORP3 citations70
US10817999B2Oct 27, 2020
Image-based overlay metrology and monitoring using through-focus imaging
KLA TENCOR CORP2 citations62
US10565697B2Feb 18, 2020
Utilizing overlay misregistration error estimations in imaging overlay metrology
KLA TENCOR CORP0 citations37