Inventor
KAMIYA CHISATO
JP6 patents
Patents
6 patentsUS7105816B2Sep 12, 2006
Electron beam device
HITACHI HIGH TECH CORP21 citations91
US7355177B2Apr 8, 2008
Electron beam device
HITACHI HIGH TECH CORP11 citations82
US7745787B2Jun 29, 2010
Electron beam device
HITACHI HIGH TECH CORP1 citations61
US7459683B2Dec 2, 2008
Charged particle beam device with DF-STEM image valuation method
HITACHI HIGH TECH CORP3 citations57
US11640897B2May 2, 2023
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US11430630B2Aug 30, 2022
Charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations50