Inventor
TATSUMI ARATA
JP8 patents
Patents
8 patentsUS11477858B2Oct 18, 2022
Sheath heater
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US12000737B2Jun 4, 2024
Temperature sensor and heater unit
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US12424421B2Sep 23, 2025
Apparatus and method for controlling a substrate temperature
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US12284731B2Apr 22, 2025
Heater and stage having the heater
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US12211710B2Jan 28, 2025
Stage, film-forming apparatus, and film-processing apparatus
NHK SPRING CO LTD0 citations47
US11201040B2Dec 14, 2021
Substrate supporting unit and film forming device having the substrate supporting unit
NHK SPRING CO LTD0 citations47
US11490464B2Nov 1, 2022
Heater unit
NHK SPRING CO LTD0 citations44
US11052455B2Jul 6, 2021
Caulking jig and manufacturing method using same
NHK SPRING CO LTD0 citations44