Inventor
MAKINO KENICHIRO
JP15 patents
⚠️ This page may combine multiple inventors who share the name “MAKINO KENICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMICONDUCTOR ENERGY LAB
9 patentsUS7727846B2Jun 1, 2010
Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB18 citations92
US7678668B2Mar 16, 2010
Manufacturing method of SOI substrate and manufacturing method of semiconductor device
SEMICONDUCTOR ENERGY LAB23 citations92
US8030169B2Oct 4, 2011
SOI substrate and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB8 citations84
US8361873B2Jan 29, 2013
Method of manufacturing an SOI substrate and method of manufacturing a semiconductor device
SEMICONDUCTOR ENERGY LAB5 citations83
US7829432B2Nov 9, 2010
Method for manufacturing SOI substrate
SEMICONDUCTOR ENERGY LAB6 citations73
US7943487B2May 17, 2011
Method for manufacturing semiconductor device
SEMICONDUCTOR ENERGY LAB4 citations61
US8884371B2Nov 11, 2014
SOI substrate and manufacturing method thereof
SEMICONDUCTOR ENERGY LAB0 citations52
US8048773B2Nov 1, 2011
Method for manufacturing SOI substrate
SEMICONDUCTOR ENERGY LAB1 citations52
US12278291B2Apr 15, 2025
Thin film transistor array having a stacked multi-layer metal oxide channel formation region
SEMICONDUCTOR ENERGY LAB0 citations51