Inventor
GIPSTEIN EDWARD
6 patents
Patents
6 patentsUS4011351AMar 8, 1977
Preparation of resist image with methacrylate polymers
IBM26 citations81
US3964908AJun 22, 1976
Positive resists containing dimethylglutarimide units
IBM23 citations80
US3961099AJun 1, 1976
Thermally stable positive polycarbonate electron beam resists
IBM9 citations72
US3931435AJan 6, 1976
Electron beam positive resists containing acetate polymers
IBM14 citations72
US3996393ADec 7, 1976
Positive polymeric electron beam resists of very great sensitivity
IBM14 citations70
US3985915AOct 12, 1976
Use of nitrocellulose containing 10.5 to 12% nitrogen as electron beam positive resists
IBM4 citations61