Inventor
MAUTZ KARL EMERSON
US9 patents
⚠️ This page may combine multiple inventors who share the name “MAUTZ KARL EMERSON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MOTOROLA INC
8 patentsUS5982166ANov 9, 1999
Method for measuring a characteristic of a semiconductor wafer using cylindrical control
MOTOROLA INC124 citations96
US5963315AOct 5, 1999
Method and apparatus for processing a semiconductor wafer on a robotic track having access to in situ wafer backside particle detection
MOTOROLA INC69 citations95
US5904800AMay 18, 1999
Semiconductor wafer processing chamber for reducing particles deposited onto the semiconductor wafer
MOTOROLA INC49 citations91
US6589099B2Jul 8, 2003
Method for chemical mechanical polishing (CMP) with altering the concentration of oxidizing agent in slurry
MOTOROLA INC19 citations89
US5966635AOct 12, 1999
Method for reducing particles on a substrate using chuck cleaning
MOTOROLA INC30 citations89
US5945354AAug 31, 1999
Method for reducing particles deposited onto a semiconductor wafer during plasma processing
MOTOROLA INC18 citations82
US6620563B2Sep 16, 2003
Lithography method for forming semiconductor devices on a wafer utilizing atomic force microscopy
MOTOROLA INC3 citations57
US6362098B1Mar 26, 2002
Plasma-enhanced chemical vapor deposition (CVD) method to fill a trench in a semiconductor substrate
MOTOROLA INC2 citations52