Inventor
KANAI NORIO
JP5 patents
Patents
5 patentsUS4824309AApr 25, 1989
Vacuum processing unit and apparatus
HITACHI LTD96 citations95
US4274004AJun 16, 1981
Ion implanter
HITACHI LTD98 citations93
US4810473AMar 7, 1989
Molecular beam epitaxy apparatus
HITACHI LTD24 citations92
US4352974AOct 5, 1982
Plasma etcher having isotropic subchamber with gas outlet for producing uniform etching
HITACHI LTD14 citations73
US4932357AJun 12, 1990
Vacuum apparatus
HITACHI LTD9 citations72