Inventor
ULRICH BRUCE DALE
US12 patents
⚠️ This page may combine multiple inventors who share the name “ULRICH BRUCE DALE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHARP LAB OF AMERICA INC
7 patentsUS5936707AAug 10, 1999
Multi-level reticle system and method for forming multi-level resist profiles
SHARP LAB OF AMERICA INC63 citations96
US6555874B1Apr 29, 2003
Method of fabricating high performance SiGe heterojunction bipolar transistor BiCMOS on a silicon-on-insulator substrate
SHARP LAB OF AMERICA INC27 citations92
US6043164AMar 28, 2000
Method for transferring a multi-level photoresist pattern
SHARP LAB OF AMERICA INC42 citations92
US6020639AFeb 1, 2000
Semiconductor wafer with removed CVD copper
SHARP LAB OF AMERICA INC41 citations92
US6436587B1Aug 20, 2002
Method of making a multi-level reticle using bi-level photoresist, including a phase-shifted multi-level reticle
SHARP LAB OF AMERICA INC25 citations86
US7157111B2Jan 2, 2007
MOCVD selective deposition of C-axis oriented PB5GE3O11 thin films on In2O3 oxides
SHARP LAB OF AMERICA INC6 citations74
US7053001B2May 30, 2006
Selective etching processes for In2O3 thin films in FeRAM device applications
SHARP LAB OF AMERICA INC0 citations52
SHARP MICROELECT TECH INC
3 patentsUS5897379AApr 27, 1999
Low temperature system and method for CVD copper removal
SHARP MICROELECT TECH INC404 citations99
US5821169AOct 13, 1998
Hard mask method for transferring a multi-level photoresist pattern
SHARP MICROELECT TECH INC128 citations97
US5753417AMay 19, 1998
Multiple exposure masking system for forming multi-level resist profiles
SHARP MICROELECT TECH INC96 citations97