Inventor

BLERSCH WERNER

DE6 patents

⚠️ This page may combine multiple inventors who share the name “BLERSCH WERNER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

STEAG RTP SYSTEMS GMBH

2 patents

US6614005B1Sep 2, 2003

Device and method for thermally treating substrates

STEAG RTP SYSTEMS GMBH36 citations90

US6316747B1Nov 13, 2001

Apparatus for the thermal treatment of substrates

STEAG RTP SYSTEMS GMBH12 citations72

SONY CORP

1 patent

US6311016B1Oct 30, 2001

Substrate temperature measuring apparatus, substrate temperature measuring method, substrate heating method and heat treatment apparatus

SONY CORP480 citations94

NOKIA CORP

1 patent

US6903262B2Jun 7, 2005

Shielding element for electric and/or electronic components of an electric and/or electronic circuit

NOKIA CORP40 citations91

STEAG AST

1 patent

US5965047AOct 12, 1999

Rapid thermal processing (RTP) system with rotating substrate

STEAG AST51 citations88

MATTSON THERMAL PRODUCTS GMBH

1 patent

US6775471B2Aug 10, 2004

Method and device for thermally treating objects

MATTSON THERMAL PRODUCTS GMBH13 citations75