Inventor
MITANI KATSUHIKO
JP13 patents
Patents
13 patentsUS6197151B1Mar 6, 2001
Plasma processing apparatus and plasma processing method
HITACHI LTD223 citations99
US6245190B1Jun 12, 2001
Plasma processing system and plasma processing method
HITACHI LTD194 citations98
US6129806AOct 10, 2000
Plasma processing apparatus and plasma processing method
HITACHI LTD92 citations98
US6902683B1Jun 7, 2005
Plasma processing apparatus and plasma processing method
HITACHI LTD29 citations92
US4979009ADec 18, 1990
Heterojunction bipolar transistor
HITACHI LTD18 citations82
US4983532AJan 8, 1991
Process for fabricating heterojunction bipolar transistors
HITACHI LTD11 citations74
US5668402ASep 16, 1997
Semiconductor device
HITACHI LTD15 citations73
US5401357AMar 28, 1995
Dry etching method
HITACHI LTD17 citations73
US5381027AJan 10, 1995
Semiconductor device having a heterojunction and a two dimensional gas as an active layer
HITACHI LTD18 citations73
US5258631ANov 2, 1993
Semiconductor device having a two-dimensional electron gas as an active layer
HITACHI LTD13 citations73
US5296733AMar 22, 1994
Hetero junction bipolar transistor with improved electrode wiring contact region
HITACHI LTD14 citations71
US5019524AMay 28, 1991
Method of manufacturing a heterojunction bipolar transistor
HITACHI LTD6 citations63
US5017517AMay 21, 1991
Method of fabricating semiconductor device using an Sb protection layer
HITACHI LTD6 citations62