Inventor
HYUN KYUNG-HO
KR4 patents
Patents
4 patentsUS6326322B1Dec 4, 2001
Method for depositing a silicon nitride layer
SAMSUNG ELECTRONICS CO LTD431 citations96
US6323084B1Nov 27, 2001
Semiconductor device capacitor and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD9 citations69
US6423998B1Jul 23, 2002
Semiconductor device capacitor and method of manufacturing the same
SAMSUNG ELECTRONICS CO LTD2 citations58
US6265264B1Jul 24, 2001
Method of doping and HSG surface of a capacitor electrode with PH3 under a low temperature/high pressure processing condition
SAMSUNG ELECTRONICS CO LTD2 citations57