Inventor
MIYAMOTO ISAMU
JP18 patents
⚠️ This page may combine multiple inventors who share the name “MIYAMOTO ISAMU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
8 patentsUS10217628B2Feb 26, 2019
Substrate processing apparatus and processing method of substrate processing apparatus
TOKYO ELECTRON LTD2 citations71
US12300524B2May 13, 2025
Substrate processing system
TOKYO ELECTRON LTD0 citations61
US12264396B2Apr 1, 2025
Substrate processing method
TOKYO ELECTRON LTD0 citations61
US11905603B2Feb 20, 2024
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations61
US11018035B2May 25, 2021
Substrate processing system
TOKYO ELECTRON LTD0 citations61
US11880213B2Jan 23, 2024
Substrate liquid processing apparatus and substrate liquid processing method
TOKYO ELECTRON LTD0 citations52
US10128137B2Nov 13, 2018
Management method of substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations51
US11011436B2May 18, 2021
Substrate processing apparatus, control method of substrate processing apparatus and substrate processing system
TOKYO ELECTRON LTD0 citations50