Inventor
HOULE FRANCES
US3 patents
Patents
3 patentsUS6770419B2Aug 3, 2004
Low silicon-outgassing resist for bilayer lithography
IBM14 citations83
US7090963B2Aug 15, 2006
Process for forming features of 50 nm or less half-pitch with chemically amplified resist imaging
IBM16 citations80
US7749422B2Jul 6, 2010
Release layer for imprinted photocationic curable resins
IBM5 citations61