Inventor

UEMURA RYOICHI

JP10 patents

⚠️ This page may combine multiple inventors who share the name “UEMURA RYOICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

8 patents

US6402844B1Jun 11, 2002

Substrate processing method and substrate processing unit

TOKYO ELECTRON LTD23 citations92

US9869941B2Jan 16, 2018

Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium

TOKYO ELECTRON LTD2 citations71

US9570326B2Feb 14, 2017

Substrate cleaning method, substrate cleaning apparatus, and computer-readable storage medium

TOKYO ELECTRON LTD2 citations71

US7867673B2Jan 11, 2011

Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program

TOKYO ELECTRON LTD4 citations62

US7862966B2Jan 4, 2011

Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program

TOKYO ELECTRON LTD2 citations62

US6921554B2Jul 26, 2005

Substrate processing method

TOKYO ELECTRON LTD0 citations51

US7867674B2Jan 11, 2011

Substrate-processing apparatus, substrate-processing method, substrate-processing program, and computer-readable recording medium recorded with such program

TOKYO ELECTRON LTD0 citations41

US10699919B2Jun 30, 2020

Coating processing apparatus and coating liquid collecting member

TOKYO ELECTRON LTD0 citations39

TADOKORO MASAHIDE

2 patents

US8242417B2Aug 14, 2012

Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate

TADOKORO MASAHIDE6 citations82

US8698052B2Apr 15, 2014

Temperature control method of heat processing plate, computer storage medium, and temperature control apparatus of heat processing plate

TADOKORO MASAHIDE2 citations60