Inventor
TUITJE HOLGER A
US3 patents
Patents
3 patentsUS7095496B2Aug 22, 2006
Method and apparatus for position-dependent optical metrology calibration
TOKYO ELECTRON LTD7 citations72
US7224450B2May 29, 2007
Method and apparatus for position-dependent optical metrology calibration
TOKYO ELECTRON LTD1 citations61
US7215419B2May 8, 2007
Method and apparatus for position-dependent optical metrology calibration
TOKYO ELECTRON LTD2 citations61