Inventor
SHIRLEY PAUL D
US23 patents
⚠️ This page may combine multiple inventors who share the name “SHIRLEY PAUL D”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MICRON TECHNOLOGY INC
19 patentsUS6830619B2Dec 14, 2004
Method and apparatus for controlling a temperature of a microelectronic substrate
MICRON TECHNOLOGY INC14 citations92
US6548111B1Apr 15, 2003
Method for controlling a temperature of a microelectronic substrate
MICRON TECHNOLOGY INC16 citations92
US6322626B1Nov 27, 2001
Apparatus for controlling a temperature of a microelectronics substrate
MICRON TECHNOLOGY INC32 citations92
US5925410AJul 20, 1999
Vibration-enhanced spin-on film techniques for semiconductor device processing
MICRON TECHNOLOGY INC47 citations92
US6232247B1May 15, 2001
Substrate coating apparatus and semiconductor processing method of improving uniformity of liquid deposition
MICRON TECHNOLOGY INC14 citations82
US7737055B2Jun 15, 2010
Systems and methods for manipulating liquid films on semiconductor substrates
MICRON TECHNOLOGY INC7 citations74
US7470638B2Dec 30, 2008
Systems and methods for manipulating liquid films on semiconductor substrates
MICRON TECHNOLOGY INC7 citations74
US11450552B2Sep 20, 2022
Methods and apparatus for adjusting surface topography of a substrate support apparatus
MICRON TECHNOLOGY INC5 citations73
US7370659B2May 13, 2008
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
MICRON TECHNOLOGY INC8 citations73
US6872254B2Mar 29, 2005
Method and apparatus for controlling air over a spinning microelectronic substrate
MICRON TECHNOLOGY INC9 citations73
US6576055B2Jun 10, 2003
Method and apparatus for controlling air over a spinning microelectronic substrate
MICRON TECHNOLOGY INC9 citations73
US6569241B2May 27, 2003
Substrate spinning apparatus
MICRON TECHNOLOGY INC6 citations73
US6398868B1Jun 4, 2002
Substrate coating apparatus
MICRON TECHNOLOGY INC5 citations73
US6261635B1Jul 17, 2001
Method for controlling air over a spinning microelectronic substrate
MICRON TECHNOLOGY INC13 citations73
US12183621B2Dec 31, 2024
Methods for adjusting surface topography of a substrate support apparatus
MICRON TECHNOLOGY INC0 citations62
US7361234B2Apr 22, 2008
Photolithographic stepper and/or scanner machines including cleaning devices and methods of cleaning photolithographic stepper and/or scanner machines
MICRON TECHNOLOGY INC4 citations62
US6555276B2Apr 29, 2003
Substrate coating and semiconductor processing method of improving uniformity of liquid deposition
MICRON TECHNOLOGY INC4 citations62
US6645703B2Nov 11, 2003
Methods of photo-processing photoresist
MICRON TECHNOLOGY INC2 citations58
US6482552B2Nov 19, 2002
Reticle forming methods
MICRON TECHNOLOGY INC3 citations58
HISHIRO YOSHIKI
3 patentsUS8163468B2Apr 24, 2012
Method of reducing photoresist defects during fabrication of a semiconductor device
HISHIRO YOSHIKI6 citations70
US8859195B2Oct 14, 2014
Methods of lithographically patterning a substrate
HISHIRO YOSHIKI1 citations48
US8309297B2Nov 13, 2012
Methods of lithographically patterning a substrate
HISHIRO YOSHIKI0 citations48