Inventor

HAN DONGGYUN

KR2 patents

Patents

2 patents

US7431855B2Oct 7, 2008

Apparatus and method for removing photoresist from a substrate

SAMSUNG ELECTRONICS CO LTD3 citations56

US9691769B2Jun 27, 2017

Memory device having buried gate and method of fabricating the same

SAMSUNG ELECTRONICS CO LTD0 citations46