Inventor
HAN WOOSUNG
KR3 patents
Patents
3 patentsUS7431855B2Oct 7, 2008
Apparatus and method for removing photoresist from a substrate
SAMSUNG ELECTRONICS CO LTD3 citations56
US6818384B2Nov 16, 2004
Methods of fabricating microelectronic features by forming intermixed layers of water-soluble resins and resist materials
SAMSUNG ELECTRONICS CO LTD6 citations52
US9786486B2Oct 10, 2017
Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber
SAMSUNG ELECTRONICS CO LTD0 citations36