Inventor
KO HYUNGHO
KR3 patents
Patents
3 patentsUS7431855B2Oct 7, 2008
Apparatus and method for removing photoresist from a substrate
SAMSUNG ELECTRONICS CO LTD3 citations56
US9766540B2Sep 19, 2017
Method of forming photomask
SAMSUNG ELECTRONICS CO LTD0 citations45
US9223199B2Dec 29, 2015
Photomask and method of forming the same
SAMSUNG ELECTRONICS CO LTD0 citations45