Inventor
OSKOTSKY MARK
US16 patents
⚠️ This page may combine multiple inventors who share the name “OSKOTSKY MARK”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML HOLDING NV
4 patentsUS7110082B2Sep 19, 2006
Optical system for maskless lithography
ASML HOLDING NV11 citations83
US7187430B2Mar 6, 2007
Advanced illumination system for use in microlithography
ASML HOLDING NV10 citations82
US6775069B2Aug 10, 2004
Advanced illumination system for use in microlithography
ASML HOLDING NV18 citations80
US7511798B2Mar 31, 2009
Off-axis catadioptric projection optical system for lithography
ASML HOLDING NV2 citations62