Inventor
VERHEIJDEN GREJA JOHANNA ADRIA
NL2 patents
Patents
2 patentsUS7589425B2Sep 15, 2009
Method of manufacturing a semiconductor device having damascene structures with air gaps
IMEC INTER UNI MICRO ELECTR9 citations79
US7361453B2Apr 22, 2008
Method for creating a pattern in a material and semiconductor structure processed therewith
IMEC INTER UNI MICRO ELECTR1 citations44