Inventor
KOH WONYONG
KR15 patents
⚠️ This page may combine multiple inventors who share the name “KOH WONYONG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UP CHEMICAL CO LTD
11 patentsUS9957614B2May 1, 2018
Ruthenium compound, preparation method therefor, precursor composition for film deposition containing same, and method for depositing film by using same
UP CHEMICAL CO LTD5 citations72
US10131680B1Nov 20, 2018
Group 4 metal element-containing alkoxy compound, preparing method thereof, precursor composition including the same for film deposition, and method of depositing film using the same
UP CHEMICAL CO LTD3 citations70
US12522626B2Jan 13, 2026
Thermally stable ruthenium precursor composition, and method for forming ruthenium-containing film
UP CHEMICAL CO LTD0 citations61
US11485749B2Nov 1, 2022
Group 4 metal element-containing compounds, method of preparing the same, precursor compositions including the same for forming a film, and method of forming a film using the same
UP CHEMICAL CO LTD1 citations60
US9255324B2Feb 9, 2016
Aluminum precursor composition
UP CHEMICAL CO LTD2 citations60
US12319705B2Jun 3, 2025
Ruthenium precursor composition, preparation method therefor, and formation method for ruthenium-containing film using same
UP CHEMICAL CO LTD0 citations59
US11912728B2Feb 27, 2024
Aluminum compounds and methods of forming aluminum- containing film using the same
UP CHEMICAL CO LTD1 citations57
US10763001B2Sep 1, 2020
Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition
UP CHEMICAL CO LTD0 citations51
US10014089B2Jul 3, 2018
Liquid precursor compositions, preparation methods thereof, and methods for forming layer using the composition
UP CHEMICAL CO LTD0 citations51
US10005795B1Jun 26, 2018
Group 4 metal element-containing compound, method of preparing the same, precursor composition including the same for depositing film, and method of depositing film using the same
UP CHEMICAL CO LTD1 citations49
US9431144B2Aug 30, 2016
Indium-containing oxide film and preparing method thereof
UP CHEMICAL CO LTD0 citations48